Mackus Lab

Eindhoven University of Technology

Zuid-Nederland (NL4) · Netherlands

ERC-funded
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ERC Starting Grant · 2020

From the bottom-up: a physico-chemical approach towards 3D nanostructures with atomic-scale control

It is a long held dream in nanoscience to synthesize materials from the bottom-up with atomic-level control of structure and properties, yet the fabrication of nanoelectronics still relies completely on top-down processing. Innovative schemes for bottom-up fabrication will be realized in this project by developing approaches for area-selective atomic layer deposition (ALD), a technique that has the potential to become the new paradigm of bottom-up processing because of its atomic-scale control. Current work on area-selective ALD focuses on the processing of planar substrates, while emerging developments in nanoelectronics and quantum computing require the fabrication of 3D nanostructured…

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